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Advanced Metallization for ULSI Applications

Advanced Metallization for ULSI Applications Proceedings of the Conference Held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan - Materials Research Society Conference Proceedings

Book (30 Apr 1992)

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Publisher's Synopsis

Featuring 77 papers from an MRS conference held in October 1991, this book examines tungsten metallization as well as other advance metals, such as Cu, Al, PVD/CVD TiN, and processes such as chemical mechanical planarization and low dielectric insulators.

Book information

ISBN: 9781558991521
Publisher: Materials Research Society.
Imprint: Materials Research Society.
Pub date:
DEWEY: 621.395
DEWEY edition: 20
Language: English
Number of pages: 580
Weight: -1g

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