Publisher's Synopsis
Volume is indexed by Thomson Reuters CPCI-S (WoS).This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.
Ultra Clean Processing of Silicon Surfaces VII - Solid State Phenomena
Paperback (25 Mar 2005) | German
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Book information
| ISBN: | 9783908451068 |
| Publisher: | Trans Tech Publications Ltd |
| Imprint: | Trans Tech Publications |
| Pub date: | 25 Mar 2005 |
| Language: | German |
| Number of pages: | 398 |
| Weight: | 748g |
| Height: | 254mm |
| Width: | 177mm |
| Spine width: | 25mm |
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