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Ultra Clean Processing of Silicon Surfaces VII

Ultra Clean Processing of Silicon Surfaces VII - Solid State Phenomena

Audio-visual / Multimedia Item (25 Mar 2005)

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Publisher's Synopsis

Volume is indexed by Thomson Reuters CPCI-S (WoS).This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.

Book information

ISBN: 9783035719765
Publisher: Trans Tech Publications Ltd
Imprint: Trans Tech Publications
Pub date:
Language: English
Number of pages: 398
Weight: -1g
Height: 142mm
Width: 125mm
Spine width: 10mm