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ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS FINFET Technology

ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS FINFET Technology

Hardback (03 Sep 2017)

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Publisher's Synopsis

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

Book information

ISBN: 9789813222151
Publisher: World Scientific
Imprint: World Scientific Publishing
Pub date:
DEWEY: 621.395
DEWEY edition: 23
Language: English
Number of pages: 248
Weight: 504g
Height: 236mm
Width: 160mm
Spine width: 20mm