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The Physics and Chemistry of SiOb2s and the Si-SiOb2s Interface--4, 2000

The Physics and Chemistry of SiOb2s and the Si-SiOb2s Interface--4, 2000 Proceedings of the Fourth International Symposium on the Physics and Chemistry of SiOb2s and the Si-SiOb2s Interface, Toronto, Canada, May 15-18, 2000 - Proceedings

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Publisher's Synopsis

Contributors from around the globe present 51 papers covering a variety of topics associated with SiO 2 and Si-SiO 2 interface. The Plenary session focused on aspects of the manufacturing and limits of SiO 2-based dielectrics used in CMOS applications. Other sessions revolved around oxide technology; research results in the area of oxynitrides and

Book information

ISBN: 9781566772679
Publisher: Electrochemical Society
Imprint: Electrochemical Society
Pub date:
DEWEY: 546.6832
DEWEY edition: 21
Language: English
Number of pages: 539
Weight: 1156g
Height: 266mm
Width: 184mm
Spine width: 25mm

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