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Soft X-ray Projection Lithography

Soft X-ray Projection Lithography

Hardback (15 Jun 2005)

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Book information

ISBN: 9781557521873
Publisher: Optical Society of America
Imprint: Optical Society of America
Pub date:
Language: English
Number of pages: 152p
Weight: -1g
Height: 292mm
Width: 228mm
Spine width: 19mm

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