Publisher's Synopsis
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
Silicon Technologies Ion Implantation and Thermal Treatment
Hardback (10 Jun 2011)
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RRP $183.72 - $182.18
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Book information
| ISBN: | 9781848212312 |
| Publisher: | Wiley |
| Imprint: | Wiley-ISTE |
| Pub date: | 10 Jun 2011 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 337 |
| Weight: | 676g |
| Height: | 156mm |
| Width: | 239mm |
| Spine width: | 27mm |
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