Semiconductor Fabrication

Semiconductor Fabrication Technology and Metrology - STP

Book (01 Jan 1989)

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Publisher's Synopsis

For the semiconductor industry. Papers cover silicon crystal growth and epitaxial deposition techniques, fabrication technology, microcontamination, metallization and interconnects, material defects and Gettering control charts, standards, and specifications. Annotation copyright Book News, Inc. Portland, Or.

Book information

ISBN: 9780803112735
Publisher: ASTM
Imprint: ASTM
Pub date:
DEWEY: 621.38152
DEWEY edition: 20
Language: English
Number of pages: 476
Weight: 680g
Height: 241mm
Width: 171mm
Spine width: 25mm