Semiconductor Device Processing Technology Trends in the VLSI Era

This book examines and projects the critical technologies involved in the fabrication of very large scale integration (VLSI) semiconductor devices, including their likely developments, why and when their introduction or demise will take place, what problems and choices are facing the industry, and where the opportunities and pitfalls may exist.;Written from an industry perspective, the book emphasizes the most rapid technological advances in the semiconductor industry and addresses the strategic issues impacting both the user and supplier of chemicals, materials and equipment. It aims to assist the reader in evaluating the spectrum of products and systems available for use at every stage in the processing of an advanced integrated circuit (IC) device. To the suppliers, the book offers insight for future user needs and should assist them in long-range planning and new product development and improvement. Topics discussed in detail include contamination control; thin film deposition and etching processes and equipment; optical, E-beam and x-ray lithography; mask making, inspection and repair techniques; and advanced laser-based technology for IC fabrication.