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Rapid Thermal Annealing/chemical Vapor Deposition and Integrated Processing

Rapid Thermal Annealing/chemical Vapor Deposition and Integrated Processing - MRS Proceedings

Paperback (05 Jun 2014)

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Publisher's Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Book information

ISBN: 9781107410756
Publisher: Materials Research Society
Imprint: Cambridge University Press
Pub date:
DEWEY: 621.38152
DEWEY edition: 23
Language: English
Number of pages: 518
Weight: 690g
Height: 229mm
Width: 152mm
Spine width: 26mm

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