Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York
Book (01 Jan 1982)
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Book information
| ISBN: | 9780883184059 |
| Publisher: | Published for the American Vacuum Society by the American Institute of Physics |
| Imprint: | Published for the American Vacuum Society by the American Institute of Physics |
| Pub date: | 01 Jan 1982 |
| DEWEY: | 621.044 |
| DEWEY edition: | 19 |
| Language: | English |
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