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Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control - Proceedings

Book (01 Jan 1993)

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    Book information

    ISBN: 9781566770668
    Publisher: Electrochemical Society
    Imprint: Electrochemical Society
    Pub date:
    DEWEY: 621.381531
    DEWEY edition: 20
    Language: English
    Number of pages: 438
    Weight: -1g
    Height: 234mm
    Width: 158mm
    Spine width: 25mm

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