Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I And Interconnect and Contact Metallization--Materials, Processes, and Reliability - Proceedings
Book (01 Jan 1999)
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Book information
| ISBN: | 9781566772006 |
| Publisher: | Electrochemical Society |
| Imprint: | Electrochemical Society |
| Pub date: | 01 Jan 1999 |
| DEWEY: | 621.395 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 274 |
| Weight: | -1g |
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