Publisher's Synopsis
These papers cover semiconductor processing, academia and equipment development. Topics include: silicide and salicide; dielectrics; metallization; process integration; and interconnect systems.
Hardback (29 Nov 1999)
Not available for sale
Includes delivery to the United States
Out of stock
These papers cover semiconductor processing, academia and equipment development. Topics include: silicide and salicide; dielectrics; metallization; process integration; and interconnect systems.
ISBN: | 9780780351745 |
Publisher: | IEEE |
Imprint: | IEEE |
Pub date: | 29 Nov 1999 |
DEWEY: | 621.38152 |
DEWEY edition: | 22 |
Language: | English |
Number of pages: | 295 |
Weight: | -1g |
Height: | 279mm |
Width: | 209mm |
Spine width: | 25mm |