Publisher's Synopsis
Today an emphasis is being placed on developing new materials processing routes which are more productive, energy conserving, and friendly to the environment. Plasma technology will be important in achieving these goals in the field of synthesis of non equilibrium-compounds and processing materials.;This book presents an international update on plasma fundamentals as well as solutions in developing and refining the novel techniques of plasma processing of advanced materials. It's recommended as a handbook for practicing engineers in the semi-conductor industry, researchers, and university instructors and graduate students.
