Photomask and Next-Generation Lithography Vii

Photomask and Next-Generation Lithography Vii

Paperback (31 Jul 2000)

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Book information

ISBN: 9780819437020
Publisher: SPIE
Imprint: SPIE
Pub date:
Language: English
Weight: 1746g
Height: 266mm
Width: 209mm
Spine width: 38mm

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