Particle Control for Semiconductor Manufacturing

Particle Control for Semiconductor Manufacturing

Hardback (26 Jan 1990)

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Publisher's Synopsis

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

Book information

ISBN: 9780824782429
Publisher: CRC Press
Imprint: CRC Press
Pub date:
DEWEY: 621.38152
DEWEY edition: 20
Language: English
Number of pages: 464
Weight: 1089g
Height: 279mm
Width: 216mm
Spine width: 27mm