Optical Microlithography XVI

Optical Microlithography XVI 25-28 February 2003, Santa Clara, California, USA - SPIE Proceedings Series

Paperback (30 Jun 2003)

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Book information

ISBN: 9780819448453
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 21
Language: English
Number of pages: 1764
Weight: 1610g
Height: 266mm
Width: 209mm
Spine width: 44mm