OSA Proceedings on Extreme Ultraviolet Lithography Proceedings of the Topical Meeting, September 19-21, 1994, Monterey, California
Book (01 Jan 1995)
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Book information
| ISBN: | 9781557523631 |
| Publisher: | The Society |
| Imprint: | The Society |
| Pub date: | 01 Jan 1995 |
| Language: | English |
| Number of pages: | 283 |
| Weight: | 657g |
| Height: | 241mm |
| Width: | 165mm |
| Spine width: | 25mm |
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