Publisher's Synopsis
Nanofabrication is the design and manufacture of devices with dimensions measured in nanometers. Nanofabrication technology is defining the forefront of technology. Nanofabrication is of interest to computer engineers because it opens the door to super-high-density microprocessors and memory chips. There are several ways that nanofabrication might be done. Nanofabrication is the technology that grew out of semiconductor microelectronics chip manufacturing. Today it is used in information storage, opto-electronics, sensors, micro-electro-mechanical devices, power semiconductors, pharmaceuticals, bio-medical applications, and, of course, in microelectronics. It is the driver technology in fields such as information technology, computers, the Internet, and bio-medical technology. Nanofabrication: Principles to Laboratory Practice develops a fundamental understanding of commonly used device fabrication processes and tools in an R&D environment. Examples from various areas of interest will be covered, such as the fabrication of photonic devices including photo detectors, waveguides, and optical coatings, which are not commonly found in other fabrication texts. Micro- and nanodevices have many benefits over their macroscale complements. Microfabrication techniques were established for solicitations in the semiconductor industry and are, consequently, not specific for biological or medical applications. However, both micro- and nanofabrication have offered a number of possibilities for the study of chemical, biological, and physical processes at the cellular and molecular scale, and for the design of synthetic devices capable of interacting with biological systems at these levels. This book is intended for the practicing scientist or engineer, with a focus on being able to transition the information from the book to the laboratory.
