Publisher's Synopsis
Key Features
- Ideally suited for Master/ PhD students, who need a basic understanding of nanolithography techniques and how/where they can be applied
- Includes state-of-the-art information with updated references for researchers and engineers needing to expand or update their knowledge on nanofabrication
- All chapters are written by world leading experts in their respective research areas
- Follows a pedagogical approach; each chapter is expected to provide worked examples, case studies and an end-of-chapter summary
- Includes interactive elements, such as video animations