Publisher's Synopsis
Collection of selected, peer reviewed papers from the 2013 International Conference on Microtechnology and MEMS (ICMM 2013), May 22-23, 2013, Beijing, China. The 28 papers are grouped as follows: Chapter 1: Materials Science and Materials Processing Technology; Chapter 2: Automation and Mechatronics;Chapter 3: Data Processing and Information Technologies; Chapter 4: Product Design.