Publisher's Synopsis
This book provides a comprehensive introduction to the theoretical and experimental basics of microsystem technology. The major theme is the combination of microelectronics and micromechanics in the design of integrated microsystems, which are of increasing importance in environmental, transport, processing, and medical control systems. This generously and attractively illustrated German–language textbook also deals with current applications and techniques, such as lithography, micromechanics, the LIGA process, and system design, and future trends.
It is ideally suited for engineering students, expecially those involved with microsystem technology, sensors, electrical engineering, mechanical engineering, and measurement and control technology, as well as students of physics in related areas.
