Microfabrication Lithography

Microfabrication Lithography

Paperback (20 Jan 2016)

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Publisher's Synopsis

All about lithography techniques used in microfabrication: semiconductor device fabrication, nanotechnology, etc

Book information

ISBN: 9781523483853
Publisher: Createspace Independent Publishing Platform
Imprint: Createspace Independent Publishing Platform
Pub date:
Language: English
Number of pages: 258
Weight: 603g
Height: 280mm
Width: 216mm
Spine width: 14mm