Microfabricated Systems and MEMS VI

Microfabricated Systems and MEMS VI Proceedings of the International Symposium - Proceedings

Book (01 Jan 2002)

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Book information

ISBN: 9781566773720
Publisher: Electrochemical Society, Inc.
Imprint: Electrochemical Society, Inc.
Pub date:
Language: English
Number of pages: 252
Weight: 453g
Height: 234mm
Width: 158mm
Spine width: 19mm