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Microelectromechanical Systems (MEMS)

Microelectromechanical Systems (MEMS) Innovation, Manufacturing Techniques and Applications

Hardback (26 Feb 2025)

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Publisher's Synopsis

To present their latest work in the field of Microelectromechanical systems (MEMS), researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their chapters will give you the opportunity to learn about advanced materials, techniques, and applications in MEMS. The topics presented included flexible MEMS techniques for multi-physical sensors, highlighting the adaptability of these systems to complex sensing environments and the use of MEMS in optical and photonic devices, demonstrating their impact on advanced imaging and communication technologies. The book also explores biomedical MEMS, which are advancing healthcare through improved diagnostics and therapeutic tools. The editors hope the book will allow professionals and readers not involved in the immediate field to understand and enjoy the topic.

Book information

ISBN: 9781836343325
Publisher: IntechOpen
Imprint: IntechOpen
Pub date:
Language: English
Number of pages: 98
Weight: -1g
Height: 254mm
Width: 178mm