Publisher's Synopsis
Volume is indexed by Thomson Reuters CPCI-S (WoS).The collection of 276 peer reviewed papers covers various high-tech fields including electronics, machinery, materials, manufacturing, testing, and disciplines of physical, chemical and biological. The papers are grouped as follows: Chapter 1: Micro and Nano Fabrication; Chapter 2: Micro Sensors; Chapter 3: Micro Actuators; Chapter 4: Microfluidics and Nanofluidics; Chapter 5: Bio MEMS and Applications; Chapter 6: Nanomaterials; Chapter 7: Optical MEMS (MOEMS); Chapter 8: Power MEMS; Chapter 9: Nano Devices and NEMS; Chapter 10: Nanobiology, Nano-Bioinformatics, Nanomedicine; Chapter 11: Packaging, Sealing and Assembling Technologies; Chapter 12: MEMS/Nano Related Research.
