Publisher's Synopsis
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Metrology, Inspection, and Process Control for Microlithography XXIII 23-26 February 2009, San Jose, California, United States - Proceedings of SPIE
Paperback (30 Mar 2009)
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Includes delivery to the United States
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Book information
| ISBN: | 9780819475251 |
| Publisher: | SPIE |
| Imprint: | SPIE |
| Pub date: | 30 Mar 2009 |
| DEWEY: | 621.381548 |
| DEWEY edition: | 22 |
| Weight: | -1g |
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