Paperback (29 May 1997)
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The first particle accelerators were built in the early 1930's. For a long time, these devices were used exclusively by nuclear physicists. In the 1960's, extensive developments in measuring techniques occurred, mainly as a result of newly developed semiconductor devices. Further strong interest arose from the semiconductor industry, and ion implantation became widely accepted as being the ultimate tool for Si-based device fabrication.
| ISBN: | 9780878497676 |
| Publisher: | Trans Tech Publications Ltd |
| Imprint: | Trans Tech Publications |
| Pub date: | 29 May 1997 |
| Number of pages: | 512 |
| Weight: | 884g |
| Height: | 247mm |
| Width: | 177mm |
| Spine width: | 25mm |
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