Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS)

Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS) - Wiley Series in Materials for Electronic & Optoelectronic Applications

1st edition

Hardback (29 Apr 2021)

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Book information

ISBN: 9781119130796
Publisher: Wiley
Imprint: John Wiley & Sons, Inc.
Pub date:
Edition: 1st edition
Language: English
Number of pages: 424
Weight: -1g
Height: 244mm
Width: 170mm