Hardback (28 Feb 1999)
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This is a collection of papers from the International Micro Electro Mechanical Systems Conference. Topics covered include; applied devices; optical applications; fluids; fabrication technologies; actuators; packaging technologies; design and modeling; and material properties.
| ISBN: | 9780780351943 |
| Publisher: | IEEE |
| Imprint: | IEEE |
| Pub date: | 28 Feb 1999 |
| DEWEY: | 621.381 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 660 |
| Weight: | -1g |
| Height: | 285mm |
| Width: | 215mm |
| Spine width: | 31mm |
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