Book (30 Jun 2003)
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A study of micro electro mechanical systems. The papers that make up the volume constitute the proceedings of the 16th IEEE Micro Electro Mechanical Systems Conference (MEMS), held in 2003. Topics discussed include: nanodevice and NEMS; light and bio manipulation; and fabrication.
| ISBN: | 9780780377448 |
| Publisher: | IEEE |
| Imprint: | IEEE |
| Pub date: | 30 Jun 2003 |
| DEWEY: | 621.381 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 711 |
| Weight: | -1g |
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