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Lithography for Semiconductor Manufacturing

Lithography for Semiconductor Manufacturing 19-21 May 1999, Edinburgh, Scotland - SPIE Proceedings Series

Paperback (30 Apr 1999)

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Book information

ISBN: 9780819432216
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: 262
Weight: 635g
Height: 267mm
Width: 210mm
Spine width: 19mm

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