Hardback (19 Nov 2010)
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
| ISBN: | 9781848212022 |
| Publisher: | Wiley |
| Imprint: | Wiley-ISTE |
| Pub date: | 19 Nov 2010 |
| DEWEY: | 621.381531 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 377 |
| Weight: | 744g |
| Height: | 163mm |
| Width: | 240mm |
| Spine width: | 29mm |
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