Ion Implantation Technology

Ion Implantation Technology 17th International Conference on Ion Implantation Technology - AIP Conference Proceedings / Materials Physics and Applications

CD-ROM (17 Mar 2009)

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Publisher's Synopsis

The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).

Book information

ISBN: 9780735406346
Publisher: American Inst. of Physics
Imprint: American Inst. of Physics
Pub date:
Language: English
Number of pages: 576
Weight: 68g
Height: 279mm
Width: 216mm
Spine width: 10mm