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Integrated Circuit Metrology, Inspection, and Process Control IX

Integrated Circuit Metrology, Inspection, and Process Control IX 20-22 February 1995, Santa Clara, California - Proceedings / SPIE--the International Society for Optical Engineering

Hardback (30 Jun 2006)

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Book information

ISBN: 9780819417879
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 20
Language: English
Number of pages: 514
Weight: -1g
Height: 280mm

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