Integrated Circuit Fabrication

Integrated Circuit Fabrication Science and Technology

Hardback (16 Nov 2023)

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Publisher's Synopsis

Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-art CMOS process flow, exposes students to big-picture thinking from the outset, and encourages a practical integration mindset. Extensive use of process and TCAD simulation, using industry tools such as Silvaco Athena and Victory Process, provides students with deeper insight into physical principles, and prepares them for applying these tools in a real-world setting. Accessible framing assumes only a basic background in chemistry, physics and mathematics, providing a gentle introduction for students from a wide range of backgrounds; and over 450 figures (many in color), and more than 280 end-of-chapter problems, will support and cement student understanding. Accompanied by lecture slides and solutions for instructors, this is the ideal introduction to semiconductor technology for senior undergraduate and graduate students in electrical engineering, materials science and physics, and for semiconductor engineering professionals seeking an authoritative introductory reference.

Book information

ISBN: 9781009303583
Publisher: Cambridge University Press
Imprint: Cambridge University Press
Pub date:
DEWEY: 621.3815
DEWEY edition: 23
Language: English
Number of pages: 700
Weight: 1772g
Height: 209mm
Width: 262mm
Spine width: 40mm