Paperback (31 Oct 1997)
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This text examines test structures for microelectronic devices, their recent progress and future directions. Topics highlighted include: process characterization, dimensional measurements, interconnection, material characterization, reliability, device characterization and statistics.
| ISBN: | 9780780338982 |
| Publisher: | I.E.E.E.Press |
| Imprint: | I.E.E.E.Press |
| Pub date: | 31 Oct 1997 |
| Language: | English |
| Number of pages: | 692 |
| Weight: | -1g |
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