IEEE Micro Electro Mechanical Systems

IEEE Micro Electro Mechanical Systems An Investigations [Sic] of Micro Structures, Sensors, Actuators, Machines, and Robotic Systems : Proceedings, Oiso, Japan, January 25-28, 1994

Hardback (01 Jan 1994)

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Book information

ISBN: 9780780318342
Publisher: Institute of Electrical and Electronics Engineers]
Imprint: Institute of Electrical and Electronics Engineers]
Pub date:
DEWEY: 621.3
DEWEY edition: 20
Language: English
Number of pages: 360