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High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films

High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films

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Book information

ISBN: 9789155446833
Publisher: Uppsala Universitet,.
Imprint: Uppsala Universitet,.
Language: English
Weight: 181g
Height: 241mm
Width: 165mm
Spine width: 6mm

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