Hardback (31 Dec 1993)
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This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
| ISBN: | 9780815513315 |
| Publisher: | Elsevier Science |
| Imprint: | William Andrew |
| Pub date: | 31 Dec 1993 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 623 |
| Weight: | 1292g |
| Height: | 247mm |
| Width: | 171mm |
| Spine width: | 50mm |
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