Hardback (31 May 2014)
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The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes. MEMS devices are defin
| ISBN: | 9781781544341 |
| Publisher: | Auris Reference Limited |
| Imprint: | Naval and Military Press |
| Pub date: | 31 May 2014 |
| Language: | English |
| Number of pages: | 312 |
| Weight: | -1g |
| Height: | 254mm |
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