Delivery included to the United States

Extreme Ultraviolet (EUV) Lithography

Extreme Ultraviolet (EUV) Lithography 22-25 February 2010, San Jose, California, United States - Proceedings of SPIE

Paperback (30 Jun 2010)

Not available for sale

Out of stock

This service is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Publisher's Synopsis

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Book information

ISBN: 9780819480507
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 22
Language: English
Number of pages: 1064
Weight: -1g
Height: 229mm
Width: 152mm