Book (28 Feb 1991)
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This research book reviews the important recent advances in the rapidly expanding III-V field. A complete reference that examines the fundamental aspects of different etching systems and their suitability in major application areas. Each system is classified according to mechanism and kinetics.
| ISBN: | 9780946395842 |
| Publisher: | Elsevier Advanced Technology |
| Imprint: | Elsevier Advanced Technology |
| Pub date: | 28 Feb 1991 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 349 |
| Weight: | -1g |
| Height: | 250mm |
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