Book (01 Jan 1999)
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Representing the proceedings of the May 2000 conference in Toronto, these 23 papers address recent applications of electrochemical processes in microelectronics. Papers on copper electroplating, its application to chip interconnections, and related challenges are prominently featured. Contributors include scientists affiliated with academic, indust
| ISBN: | 9781566772310 |
| Publisher: | Electrochemical Society Inc. |
| Imprint: | Electrochemical Society Inc. |
| Pub date: | 01 Jan 1999 |
| DEWEY: | 621.395 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 400 |
| Weight: | 703g |
| Height: | 228mm |
| Width: | 152mm |
| Spine width: | 25mm |
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