Electrochemical Processing in ULSI Fabrication III Proceedings of the International Symposium - Proceedings
Book (01 Jan 2002)
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Book information
| ISBN: | 9781566772730 |
| Publisher: | Electrochemical Society |
| Imprint: | Electrochemical Society |
| Pub date: | 01 Jan 2002 |
| DEWEY: | 621.395 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 258 |
| Weight: | 476g |
| Height: | 234mm |
| Width: | 158mm |
| Spine width: | 19mm |
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