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Chemistry of Atomic Layer Deposition

Chemistry of Atomic Layer Deposition - De Gruyter Textbook

1st edition

Paperback (22 Nov 2021)

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  • RRP NZ$144.83
  • NZ$135.03
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    Publisher's Synopsis

    This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

    Book information

    ISBN: 9783110712513
    Publisher: De Gruyter
    Imprint: De Gruyter
    Pub date:
    Edition: 1st edition
    Language: English
    Number of pages: 113
    Weight: 214g
    Height: 240mm
    Width: 170mm
    Spine width: 6mm

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