Hardback (05 Sep 1990)
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Proceedings of the Boston symposium held Nov. 1989 on chemical vapor deposition. Topics include diagnostics and modelling, plasma enhanced CVD of silicon oxides and nitrides, semiconductors, novel materials. Acidic paper. Annotation copyright Book News, Inc. Portland, Or.
Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.
| ISBN: | 9781558990531 |
| Publisher: | Materials Research Society |
| Imprint: | Cambridge University Press |
| Pub date: | 05 Sep 1990 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 250 |
| Weight: | 1000g |
| Height: | 231mm |
| Width: | 152mm |
| Spine width: | 23mm |
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