Publisher's Synopsis
Volume is indexed by Thomson Reuters CPCI-S (WoS).This work is intended to promote technologies for the development of micro-, nano- and cross-scale integration, to impart details of new micro/nano technologies, to spread relevant information and knowledge on every fields and to promote the industrialization and development of nanotechnology. The book contains 55 up-to-date articles in the areas of nanotechnology, nanomaterials, micro/nanofabrication, nanocomposites, nanoparticles, functional materials, MEMS devices and systems.
