Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors - SpringerBriefs in Applied Sciences and Technology

1st Edition 2018

Paperback (23 Oct 2018)

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Publisher's Synopsis

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

Book information

ISBN: 9789811325700
Publisher: Springer Nature Singapore
Imprint: Springer
Pub date:
Edition: 1st Edition 2018
Language: English
Number of pages: 115
Weight: 209g
Height: 235mm
Width: 155mm
Spine width: 7mm